Research / 2018 / Article / Fig 8

Research Article

Structure-Mediated Excitation of Air Plasma and Silicon Plasma Expansion in Femtosecond Laser Pulses Ablation

Figure 8

Silicon structure evolution during multiple pulses ablation. (a-c) SEM images of silicon structures induced by the second, third, and fourth pulses. (d) AFM profiles of the structure induced by the second, third, and fourth pulses. The laser fluence is 7.27 J/cm2.