Buckled MEMS Beams for Energy Harvesting from Low Frequency Vibrations
(a) Schematics of the doubly clamped beam based energy harvester. The piezoelectric element is in 33 mode with top interdigitated electrodes. The piezoelectric element and electrode span symmetrically from − · to − · and · to · on the substrate. (b) The beam has layers of thin films in different material with various thicknesses.