Research / 2019 / Article / Fig 1

Research Article

Buckled MEMS Beams for Energy Harvesting from Low Frequency Vibrations

Figure 1

(a) Schematics of the doubly clamped beam based energy harvester. The piezoelectric element is in 33 mode with top interdigitated electrodes. The piezoelectric element and electrode span symmetrically from − · to − · and · to · on the substrate. (b) The beam has layers of thin films in different material with various thicknesses.