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Research Article

Buckled MEMS Beams for Energy Harvesting from Low Frequency Vibrations

Table 1


MaterialResidual Stress (MPa)

Thermal Oxide (300 ~ 1000nm)−300MPa ± 4%
LPCVD Nitride (200nm)100MPa
LPCVD Nitride (700nm)160MPa
LPCVD Nitride (1200nm)250MPa
PECVD Oxide (Low Frequency)−260MPa ± 40%
PECVD Nitride (75% High Frequency)−240MPa ± 40%
ZrO2 (90nm)370MPa ± 15%
PT (10nm)400MPa ± 15%
PZT (140 ~ 220nm)650MPa ± 15%