Research Article
Emission Enhancement of Fluorescent Molecules by Antireflective Arrays
Figure 2
Fabrication process of the biomimetic antireflective nanohole array. (a) Preparation of the monolayer of PS nanospheres on Si substrates. (b) Creation of the Si stamp by RIE with nanospheres as a mask. (c) Fabrication of the biomimetic antireflective nanohole array with nanoimprint lithography.