Research / 2019 / Article / Fig 4

Review Article

Defect Engineering in 2D Materials: Precise Manipulation and Improved Functionalities

Figure 4

Defect engineering by plasma irradiation. (a) PL spectra of monolayer MoS2 after oxygen plasma irradiation with different durations (1) and relaxed configuration and charge density of an O2 molecule chemisorbed on a monosulfur vacancy of MoS2 (2). The positive and negative charges are shown in red and blue, respectively. Reproduced from [13]. (b) Transfer characteristic of WSe2 FET with/without H2 plasma treatment (1) and the schematic diagram of Se vacancies in WSe2 (2). Reproduced from [66]. (c) Transfer characteristic of WS2 with/without N2 plasma treatment (1) and the schematic diagram of P substitutions in WS2 (2). Reproduced from [75].