Research / 2019 / Article / Fig 2

Research Article

A Piezoelectric and Electromagnetic Dual Mechanism Multimodal Linear Actuator for Generating Macro- and Nanomotion

Figure 2

Working principle of piezoelectric step motion. (a) Sequence voltage signals applied to the piezoelectric stacks and ; (b) driving process and step motion of the coslider; (c) step displacement produced by the piezoelectric stack.