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Research Article

A Piezoelectric and Electromagnetic Dual Mechanism Multimodal Linear Actuator for Generating Macro- and Nanomotion

Table 1

Comparison of open-loop motion performances for high speed and high resolution.

ParametersOur workPrevious work
Electromagnetic motionPiezoelectric step motionTraditional electromagnetic linear actuatoraTraditional piezoelectric ultrasonic motor [25, 26, 39]Traditional piezoelectric step motor [22]Stacked stage [30, 38]

Max speed (mm/s)51.20.134501527610
Traveling range (mm)10015052
Displacement resolution (nm)250100~100055

aHDS-ULS-X, Heidstar Co., Xiamen, China.