Research / 2019 / Article / Fig 3

Research Article

Reactive Inorganic Vapor Deposition of Perovskite Oxynitride Films for Solar Energy Conversion

Figure 3

Cross-sectional TEM and SAED images of the SrTaO2N film. Cross-sectional TEM image (a) and SAED images (b, c) at different depths of the SrTaO2N film.