Research / 2020 / Article / Fig 1

Review Article

Nanoelectromechanical Sensors Based on Suspended 2D Materials

Figure 1

2D NEMS device fabrication methods. (a–e) Create a 2D material layer on the device substrate, where for (a) and (b) the device substrate is prepatterned and for (c–e) the substrate is patterned afterwards. (f)–(j) show post 2D material layer fabrication steps to create suspended membranes.