Research / 2020 / Article / Fig 2

Review Article

Nanoelectromechanical Sensors Based on Suspended 2D Materials

Figure 2

CMOS integration of 2D NEMS sensors in backend. (a) NEMS sensor devices integrated in the backend with interconnect layers stacked on top and frontend. (b) Integration of the 2D material in the frontend on top of the interconnect layers. The silicon IC substrate (dark grey) with transistors (blue) and interconnect metals (gray/yellow) is shown. Red arrows indicate the location of the black suspended graphene.