Research / 2020 / Article / Fig 3

Review Article

Nanoelectromechanical Sensors Based on Suspended 2D Materials

Figure 3

Piezoresistive NEMS pressure sensor. (a) Fabrication method of the suspended membrane (according to Figure 1). (b, c) Example device image [6]. (d–f) Working principle: pressure difference causes tension which alters the membrane resistance by the piezoresistive effect. (g) Graphene piezoresistive pressure sensor measurement [25]. Capacitive pressure sensor: (h) fabrication of the suspended membrane. (i) Device schematic [182]. (j–l) Working principle: a pressure difference causes the membrane to deflect and alter the capacitance between the graphene and the bottom electrode. (m) Device measurement [182].