Research / 2020 / Article / Fig 5

Review Article

Nanoelectromechanical Sensors Based on Suspended 2D Materials

Figure 5

SNR comparison of piezoresistive (PR), capacitive (CAP), and squeeze-film (SQF) MEMS pressure sensors. Included are Wagner et al. [6], Murata SCB10H [184], Dolleman et al. [175], Stampfer et al. [188], Epcos C35 [200], Zhang et al. [172], Wang et al. [185], Davidovikj et al. [182], and Smith et al. [25].