Different superhydrophobic silicon surfaces prepared by femtosecond laser ablation under the reactive SF6
gas. (a, b) SEM images of the laser-structured silicon microstructure. (c, d) Water droplet on the fluoroalkylsilane-modified (c) flat silicon surface and (d) textured silicon surface. (e) Photography of a water droplet on the femtosecond laser-structured superhydrophobic black silicon surface. (f) Shape of the water droplet in (e). (g, h) Surface microstructure of the black silicon in (e). Reproduced from [99
] with the permission.