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Research Article

In Situ Observation of Crystalline Silicon Growth from SiO2 at Atomic Scale

Kaihao Yu1, Tao Xu1, Xing Wu2, Wen Wang1, Hui Zhang1, Qiubo Zhang1, Luping Tang1, and Litao Sun1

1SEU-FEI Nano-Pico Center, Key Laboratory of MEMS of Ministry of Education, School of Electronic Science and Engineering, Southeast University, Nanjing 210096, China
2Shanghai Key Laboratory of Multidimensional Information Processing, Department of Electronic Engineering, East China Normal University, Shanghai 200241, China
Correspondence should be addressed to Xing Wu; xwu@ee.ecnu.edu.cn and Litao Sun; slt@seu.edu.cn

How to Cite this Article

Kaihao Yu, Tao Xu, Xing Wu, et al., “In Situ Observation of Crystalline Silicon Growth from SiO2 at Atomic Scale,” Research, vol. 2019, Article ID 3289247, 9 pages, 2019. https://doi.org/10.34133/2019/3289247.

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