Alt text
Figure 12: Self-deformation tuned THz modulator. Panel . THz modulator structure diagram (a) and modulation performance diagram (b) based on metamaterial. Reproduced from [78]. Panel . (a) Schematic of the film metamaterial unit structure with double-layer USRRs for THz wave phase shifter. (b) Overview of the developed flexible film metamaterial device. Reproduced from [79].