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Figure 1: MEMS chiral device configuration. (a, b) SEM images of one bimorph microhelix in suspended state (defined as OFF, 3D configuration) and actuated states (ON, 2D planar configuration), respectively. Geometrical parameters of anchor and cantilever are indicated, and thickness of metal (aluminum, ) in the bimorph cantilever is 400 nm. (c) Scheme of the metamaterial array comprising of diatomic metamolecules with microhelices of opposite handedness. A zoomed-in image of a metamolecule is highlighted where two microhelices are electrically isolated and separately connected to two actuation channels (C1 and C2).