Skip to main content

Research Article

Ultrafast Laser Writing Deep inside Silicon with THz-Repetition-Rate Trains of Pulses

Andong Wang, Amlan Das, and David Grojo

Aix-Marseille Univ., CNRS, LP3 UMR 7341, 13009 Marseille, France
Correspondence should be addressed to Andong Wang; andong.wang@univ-amu.fr and David Grojo; david.grojo@univ-amu.fr

How to Cite this Article

Andong Wang, Amlan Das, and David Grojo, “Ultrafast Laser Writing Deep inside Silicon with THz-Repetition-Rate Trains of Pulses,” Research, vol. 2020, Article ID 8149764, 11 pages, 2020. https://doi.org/10.34133/2020/8149764.

  • Views 513
  • Citations 0
Altmetric Attention Score
Find out more